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Chinese lithography machine is expected to solve the problem of sticking neck. The top three will work together to develop high-end lithography machine.

via:博客园     time:2019/8/12 18:37:36     readed:166

Author: Xianrui

In semiconductor manufacturing, lithography is the most important link, but also the key to determine the level of semiconductor technology. High-end chips need lithography many times, accounting for one third of the manufacturing cost. At present, the global lithography machine is mainly monopolized in the hands of ASML in the Netherlands, Canon in Japan and Nikon.

Domestic lithography research and development capacity is also available, but the technology level is relatively low. Domestic companies'lithography machine is mainly used for 90 nm and above process. Advanced technology still depends on imported lithography machine, but this situation may accelerate change.

Recently, Beijing Guowang Optical Technology announced that the company's capital-raising plan worth 1 billion yuan has been completed in the Beijing Property Exchange. The company has introduced Changchun Institute of Optical Precision Machinery and Physics of the Chinese Academy of Sciences and Shanghai Institute of Optical Precision Machinery of the Chinese Academy of Sciences as strategic investors. The share price is 1 billion yuan, and the corresponding proportion is 33.33%.

Changchun, affiliated to the Chinese Academy of Sciences, Beijing Research Institute itself is also an important force in the field of domestic lithography machine research and development. Now the three companies have carried out close cooperation, which means that Beijing has taken substantive steps in promoting the production of core components of domestic lithography machines and will speed up the breakthrough in the manufacture of domestic middle and high end lithography machines.

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