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After Samsung, SK Hynix will also use EUV lithography machine in memory: 1 billion

via:驱动之家     time:2020/5/29 20:12:14     readed:108

ASML's EUV lithography machine has become the key to the process below 7Nm. Samsung, TSMC and Intel are all purchasing EUV lithography machines with a unit price of up to 1 billion yuan for production. In addition to CPU, memory technology will be gradually imported into EUV lithography machine, and SK Hynix will do the same after Samsung.

According to South Korean media reports, SK Hynix, the world's second largest DRAM memory supplier, has been developing memory for 1A nm process, Internal codeEUV lithography is expected to be introduced.

As for the memory, it faces the problem of miniaturization like the CPU logic process,EUV lithography machine can reduce multiple exposure process and provide process accuracy, thus reducing production time, reducing cost and improving performance.

However, there are many problems in using EUV technology for memory. The first problem is that the price of EUV photolithography machine is too high. One billion EUV photolithography machines need to be maintained. Therefore, the initial cost pressure should be borne.

At present, SK Hynix's most advanced memory technology is mainly 1y and 1z nm, which will account for 40% of the production capacity in the second half of this year.

In early March, Samsung said,It will be fully imported into EUV from the fourth generation of 10 nm DRAM (D1A) or high-end 14 nm DRAMNext year, based on the large-scale production of ddr5 and lpddr5 memory chips by D1A, the productivity of 12 inch wafer is expected to double.

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