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ASML China President: Export of EUV lithography machines in China pending approval from the Dutch government

via:博客园     time:2020/11/6 12:46:26     readed:296

News reporter Han Shengjiang


On November 5, Shen Bo, global vice president and President of China region of ASML, a Dutch lithography giant, was receiving surging news at the scene of the third China International Import Expo( www.thepaper.cn )During the exclusive interview, the company is open to exporting IC lithography machines to China, treats customers all over the world equally and will give full support under the framework of laws and regulations.

At present, China has become one of the fastest growing regions in the world. Integrated circuit industry is also a strategic, basic and leading industry in China's national economic and social development, and its position is very important.

ASML is one of the world's largest integrated circuit equipment manufacturers headquartered in Veldhoven, the Netherlands. The lithography machine produced by the company is an essential core role in the production of integrated circuits. At present, the processing limit of the most advanced EUV (extreme ultraviolet) lithography machine produced by the company has reached 5 nm. The chip of Apple's latest iPhone 12 is a 5-nanometer chip supported by ASML.

Surging news( www.thepaper.cn )At present, ASML is in the leading position in the field of integrated circuit lithography in the world. How do you think this position came from?

Shen Bo:Now you may pay more attention to the result, which is where we are now, but in fact, for us, the process of getting where we are is more important. ASML company has experienced a lot of twists and turns since it was founded 36 years ago. Especially in the first ten years, it almost died many times. Later, we slowly found out our own way in technology, and after a lot of efforts, we have come to this day step by step.

I think there are two reasons that are particularly important: first, the whole company is in a very open state from R & D to production. We have a lot of partners, and we are very transparent with our customers. Many things are jointly developed. 85% of the components of ASML products are developed together with the supply chain. An open ecosystem enables enterprises to find the best suppliers in the world, including optical devices, mechanical devices, etc.

Second, our company's dedication to technology. ASML is a very strong engineer culture, most of the employees are engineers, so there is a technology

We pay more attention to our latest technology. In fact, there are decades of efforts behind this. We may put forward an idea for a product 20 years ago, and then invest 200 yuan in 20 years A few years ago, many people in the industry doubted whether our technology could be industrialized. In this case, our company still maintained a pioneering spirit.


Surging news( www.thepaper.cn )What is the company's current development in China?

Shen BoSince entering the Chinese market 30 years ago, ASML has provided comprehensive technology and capabilities to meet the needs of Chinese customers. At present, we have provided customers with more than 700 installed units in China. While complying with laws and regulations, ASML fully supports the development of customers and China's IC industry.

In order to better support and meet the needs of customers, ASML officially established a branch in Tianjin in 2000. At present, ASML has 12 offices, 11 warehousing and logistics centers, 2 development centers and 1 Training Center in China, with more than 1000 employees.

Our earliest machine came into China in 1988. We have a good cooperation with the Chinese IC industry at every stage. At present, more than 700 units installed in China cover most types of ASML products.

Here I would like to explain that sometimes there may be a misunderstanding whether new products come out and old products become obsolete. In fact, looking back now, our products in the 80s and 90s will still have a lot of demand in the market. Because of the diversity of IC applications, the number of 7-nm ,5-nm ,3-nm chips in the whole chip supply chain is about 10%, most of which are needed

Sometimes I think

Surging news( www.thepaper.cn )What is the next development plan for the Chinese market? How to look at China's integrated circuit market in the future?

Shen BoAt present, China's integrated circuit industry is developing very strongly, and the country has invested a lot in integrated circuit in recent years. As ASML, it is to better serve our customers with the development of China's integrated circuit. Because the lithography machine is the core equipment for the customer's chip factory, we should first ensure the normal operation of the machine and help the customer to do a good job in the product. We will strengthen the service support in this respect.

In recent years, we have set up our own training center in China to train talents in the lithography industry. At the same time, it has become two technology development centers in Shenzhen and Beijing, doing the development of photolithography and measurement.

We will focus on the introduction of an integrated lithography solution that includes modeling, analysis and measurement. This scheme includes an advanced control ability lithography machine, which consists of three parts: computational lithography and measurement, to form a

In general, the company's overall status in China is getting better and better. In the future, its services will be more diversified, and its investment in China will be more and more large.


Surging news( www.thepaper.cn )There are many types of lithography machines, such as DUV and EUV. Will ASML plan to export EUV to China?

Shen BoWe are still waiting for the export license of the Dutch government. ASML must be exported under the premise of complying with laws and regulations. However, we are very open to exporting lithography machines to China. We treat customers all over the world equally. As long as we can provide technology and equipment, we will give full support. In fact, in the second and third quarter of 2020, the number of lithography machines sent to mainland China exceeded 20% of the total number of global stations.

Surging news( www.thepaper.cn )What do you think of the recent development of China's integrated circuit industry?

Shen BoIn fact, the history of the integrated circuit industry has been 60 years. Now, the data generated in the information age and the demand for computing power are becoming higher and higher. The entire integrated circuit industry has become a very basic key industry in the level of social development and scientific and technological progress.

However, there are thousands of processes in chip manufacturing, not only lithography. From our point of view, there are some different requirements for equipment after the overall process level has reached a certain level, but the technical reserve time ahead is very long. I don't think we can do it today. I think everyone in this industry is a little too much now

We do this industry, the biggest experience is that this is really a very difficult industry, very difficult, we need patience, perseverance, can adhere to, really continue to invest in, to solve one problem after another, in order to really forward development, to be able to sink down.

From the perspective of the development of the chip manufacturing industry, there is a process of continuous integration in the world, and China will eventually integrate into this system, so there are some processes that must be experienced.

Surging news( www.thepaper.cn )Do you think the next step in IC technologyWhat's the direction of development?

Shen BoWith the development of 5g, artificial intelligence, big data and Internet of things, the application beyond imagination has been catalysed, which puts forward higher requirements for chip performance. Now the integrated circuit industry talks more about Moore's law, that is, every two years the chip technology will move forward, in fact, the performance of the chip every two years will be more powerful and the cost will be lower. For example, a 512M USB flash drive may cost hundreds of Yuan ten years ago, but now it can be bought for a few yuan. Moore's law actually makes chips cheaper, which is all brought about by the development of technology.

In terms of the industry as a whole, I think there are several major directions for us to push the IC industry forward: one is to make chips smaller from a physical point of view. In this regard, we ASML At the same time, the industry also needs to improve the integration of chips, so that the functions of chips are no longer single. Originally, storage is storage, logic is logic. Now, multiple functions may be integrated in the same chip. In addition, the progress of devices and materials of chips, such as silicon-based chips, is to see whether cobalt chips should be made. The combination of these directions will make the chip more powerful and cheaper.

Surging news( www.thepaper.cn )As an industry leader, are you not afraid of competition from other companies to impact your current position?

Shen BoNo, we have always stressed that ASML is a very open company, and competition will certainly promote technological progress. Therefore, we welcome competition. Only through competition can we fully tap all our talents and talents and promote the development of the industry. I think our company has this mission to some extent to help the whole industry to move forward. As long as it is conducive to the development of various industries, we welcome it.

Within a system, the most efficient division of labor and cooperation, chip technology is more and more competitive, people can consume lower price, better performance electronic products. Only by opening up can we innovate most effectively, and the efficiency is very low when we close the door.

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